Substrate Rotation Controller

Based on the same high precision AC servo motor as the Motorized Valve Controller, our Dual Axis Substrate Rotation Controller controls both substrate rotation and position (growth, transfer and beam flux).

  • The Substrate Rotation Controller (SRC) allows the precise control of the rotation of the substrate as well as an additional axis of positioning in an MBE system.  The SRC has been designed for reliable continuous operation in a production environment as well as being simple and intuitive to use.
  • The SRC incorporates high precision motion control hardware which allows highly accurate, reproducible substrate rotation speed and positioning.  By utilizing a precision AC servo motor with an integrated 10,000 count/revolution optical encoder, the SRC is able to precisely adjust substrate angle, rotation speed or flip position.
Part numbers
  • 01-0006
    Dual Axis Substrate Rotation Controller
  • 20-0367
    Substrate Rotation Controller Interface Kit for V80H Manipulator

Documentation

  • Manual  (305 KB)