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Valved Source Controller

Works with any valved source.

Presentation

Both the motorized valve controller and substrate rotation controller are based on the same high precision AC servo motor and drive electronics. Fully configurable to work with any valved source or substrate azimuthal rotation. High precision jog wheel allows precise and rapid manual positioning of substrate angle for RHEED. Integrates easily with any growth software (uses Eurotherm protocol)

01-0004 (RM-7)
Small Motor (100W)
01-0005 (RM-7)
Large Motor (400W)

Product Specifications

Operating Temperature	0 to 55°C
Operating Humidity	0‐85%; non‐condensing
Operating Altitude	5000 ft. (1520 m)
AC Input Voltage	1φ: 200~255V @ 50/60Hz ±5%
AC Input Frequency	50 or 60Hz ±5%
Max Torque Large Motor Max Torque Small Motor	3.82 NM (400W motor) 0.95 NM (100W motor)
Rack Size	2U (full rack)
Physical Dimensions	Controller (2U full rack) Weight: 18.3 lbs (8.32 kg) Height: 3.5 in (8.9 cm) Width: 19 in (48.2 cm) Depth: 20 in (50.8 cm) Servo Motor Assembly Weight: 5.7 lbs (2.6 kg) Height: 2.4 in (6.0 cm) Width: 2.4 in (6.0 cm) Length: 7.75 in (19.65 cm)

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