CLS 21
Up to 2"
Compact 21 T
10-port high-end R&D system
Compact 21 DZ
12-port high-end R&D system
SIVA 21
The best SiGe R&D system
Compact 21 EB 200
Dual electron beam, 8 effusion source ports R&D System
MBE 412
Up to 4"
MBE 49
Up to 8"
MBE 6000
Up to 300 mm
MBE 7000
3x8"
Refurbishment
The low cost-effective alternative to purchasing new equipment.