Viewport Heaters
  • Bomco windows provide the best solution for UHV compatible optical access to your wafer for optical pyrometry, ellipsometry, band edge thermometry, and all other optical in-situ sensors. Our external flexible heater allows these windows to be heated continuously to prevent buildup of As. And, unlike most internally heated viewports, the window can remain hot while measuring wafer temperature with a pyrometer.

    The heater is supplied in 2 different sizes to fit either a 1.5″ or 2″ diameter window. A k-type thermocouple is integrated into the heater for temperature monitoring. The heater is typically powered by a standard variac.