MBE Sources

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Crystal XE

EZ-CURVE® Real-time curvature measurement

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  MCL – Mercury « constant level » Cell

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  VHG-500 – Valved Mercury Cell

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  Carbon cell

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  HAT – Atomic Hydrogen Thermal Cracker

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  HTI – High Temperature Injector

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  VRF-X 600 – Valved RF Plasma Source

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  HT cell – High Temperature cell

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  High speed RF Plasma Source for Nitrogen/ Oxygen

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  RF Plasma Source for Hydrogen – RF-H 600

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  CBr4 Module for Gas Injector

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  LTI – Low Temperature Injector

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  Valved Cracker Cell for Arsenic – VAC

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  Valved Cracker Cell for Phosphorus – KPC

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  Valved Source for Corrosive Materials – VCOR

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  Dual filament source – ABN DF

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  Aluminum source ABN BF CL & CN

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  Heated insert cell for Ga & In – ABI

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  In & Ga Graphite-crucible cells for Nitrides – MS

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  Dopant sources – ABN D

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