CBr4 Gas Delivery System

High dynamic range doping with abrupt profiles


  • Precisely and rapidly change CBr4 doping level over 4 orders of magnitude
  • Ideal for VCSEL growth and delta doped layers
  • Run-Vent configuration
  • Multiple orifice valve mounts on chamber for rapid doping changes
  • Stainless steel gas cabinet
  • Heated lines
  • Uses Eurotherm protocol to be compatible with all MBE software including Crystal XE, Crystal, AMBER, and Molly™
  • Variety of gas injector designs available
  • Proven design

Part numbers

CBr4 Gas Delivery System

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