CBr4 Gas Delivery System
High dynamic range doping with abrupt profiles
Presentation
- Precisely and rapidly change CBr4 doping level over 4 orders of magnitude
- Ideal for VCSEL growth and delta doped layers
- Run-Vent configuration
- Multiple orifice valve mounts on chamber for rapid doping changes
- Stainless steel gas cabinet
- Heated lines
- Uses Eurotherm protocol to be compatible with all MBE software including Crystal XE, Crystal, AMBER, and Molly™
- Variety of gas injector designs available
- Proven design
Part numbers
10-0127
CBr4 Gas Delivery System