Substrate Rotation Controller

Based on the same high precision AC servo motor as the Motorized Valve Controller, our Dual Axis Substrate Rotation Controller controls both substrate rotation and position (growth, transfer and beam flux).


The Substrate Rotation Controller (SRC) allows for precise control of the rotation of the substrate as well as an additional axis of positioning in an MBE system. The SRC has been designed for reliable continuous operation in a production environment as well as being simple and intuitive to use.

The SRC incorporates high precision motion control hardware which allows highly accurate and reproducible substrate rotation, speed and positioning. By utilizing a precision AC servo motor with an integrated 10,000 count/revolution optical encoder, the SRC is able to precisely adjust substrate angle, rotation speed or flip position.

  • 01-0006
    Dual Axis Substrate Rotation Controller
  • 20-0367
    Substrate Rotation Controller Interface Kit for V80H Manipulator

Product Specifications

Operating Temperature 0 to 55°C
Operating Humidity 0-85%; non-condensing
AC Input Voltage 1φ: 200~255V @ 50/60Hz ±5%
AC Input Frequency 50 or 60Hz ±5%
AC Input Current <8 Amps @ 208Vac
Max Torque Large Motor
Max Torque Small Motor
3.82 NM (400W motor)
0.95 NM (100W motor)
Rack Size Standard 2U, 20 in. deep
Controller Dimensions 19×3.5×20 in. (48.2×8.9×50.8 cm)
Controller Weight 18.3 lbs (8.32 kg)
400W Motor Dimensions 2.4×2.4×7.75 in. (6x6x19.7 cm)
400W Motor Weight 5.7 lbs (2.6 kg)
Communications RS-232; DTE configuration DB-9 Male

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