riber

Viewport Heaters

Details

Bomco windows provide the best solution for UHV compatible optical access to your wafer for optical pyrometry, ellipsometry, band edge thermometry, and all other optical in-situ sensors. Our external flexible heater allows these windows to be heated continuously to prevent buildup of As. And, unlike most internally heated viewports, the window can remain hot while measuring wafer temperature with a pyrometer.

The heater is supplied in 2 different sizes to fit either a 1.5″ or 2″ diameter window. A k-type thermocouple is integrated into the heater for temperature monitoring. The heater is typically powered by a standard variac.

Information request

    Please enter the letters and numbers you see in the picture.

    captcha

    *required

    The information collected on this form is recorded in a computerized file by RIBER Inc. to answer your questions and requests.

    They are kept for 3 years and are intended for the sales department.

    In accordance with the GDPR directive, you can exercise your right of access to data concerning you and have them rectified by contacting us using this same form.

    For more information: See our privacy policy

    © 2024 Riber Inc. - Legal Notice - General purchasing conditions - Cookies Management

    Double-Y